Waferpedia

Tool family

Temescal CV-12SLX

Temescal CV-12SLX is a 12 kW electron beam power supply used in Temescal UEFC deposition systems.

Models in this family

  1. Temescal CV-12SLX is a 12 kW electron beam power supply used in Temescal UEFC deposition systems.