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Temescal

CV-12SLX

Electron beam power supplyTemescal CV-12SLX family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Temescal CV-12SLX is a 12-kW constant-voltage switching electron beam power supply. The Temescal CV-12SLX is designed to power and control up to two electron beam sources. The Temescal CV-12SLX delivers up to 10 kV at 0–1200 mA.[1][2][3]

TemescalCV-12SLX
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Power

12 kW[4]

Optics

Up to two electron beam sources[2]

How it works

The Temescal CV-12SLX delivers up to 10 kV at 0 to 1200 mA. The Temescal CV-12SLX has linearly adjustable high voltage from 0 to 10 kV and linearly adjustable emission current from 0 to 1200 mA. The Temescal CV-12SLX regulates high voltage to within ±0.5% and regulates constant emission current to within ±0.5%. The Temescal CV-12SLX has arc recovery within 3.5 ms. The Temescal CV-12SLX includes an autobias control feature that maintains optimal bias voltage as filament ages. The Temescal CV-12SLX includes 14 front panel fault-indicator LEDs, front panel high-voltage and emission-current meters, a rear-panel diagnostic port, air cooling, complete safety interlocking, and CE certification.[1][2][5][3]

What can it run?

Process applications and technology nodes documented for this tool.

  • Metallization for lift-off processes
  • High-throughput evaporation

What do the numbers mean?

Power & electrical10

Power
12 kW[4]2 sources
Accurate?
Type
Electron beam power supply[4]
Accurate?
Type
Constant-voltage switching power supply[1]
Accurate?
Output voltage
0–10 kV[1]
Accurate?
Voltage regulation
Within ±0.5%[1]
Accurate?
Input power options
208 V ac +10%/-5%, 60 Hz, 50 A 3-phase delta (4-wire) or 400 V ac +10%/-5%, 50 Hz, 30 A 3-phase delta (5-wire)[1]
Accurate?
Filament power supply input
208 VAC ±10%, 3.5 A, 50/60 Hz, single-phase[2]
Accurate?
Filament power supply output
10 VAC, 50 A, 28.5 kHz max.[2]
Accurate?
Filament power supply input
220V AC ±10%, 6.25 A, 50/60 Hz, single-phase[1]
Accurate?
Filament power supply output
10 V ac, 50 A, 40 kHz max. per source[1]
Accurate?

Optics & imaging1

Controlled sources
Up to two electron beam sources[2]
Accurate?

Dimensions & facilities1

Weight
93 lbs. total[1]
Accurate?

Configuration & options6

Compatible deflection
Permanent or electromagnetic deflection[1]
Accurate?
Output current
0–1200 mA[1]
Accurate?
Current regulation
Within ±0.5%[1]
Accurate?
Arc recovery
Within 3.5 ms[1]
Accurate?
Cooling
Air cooled[1]
Accurate?
Mounting
Rack mountable[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power12 kW[4]
  • TypeElectron beam power supply[4]
  • TypeConstant-voltage switching power supply[1]
  • Output voltage0–10 kV[1]
  • Voltage regulationWithin ±0.5%[1]
  • Input power options208 V ac +10%/-5%, 60 Hz, 50 A 3-phase delta (4-wire) or 400 V ac +10%/-5%, 50 Hz, 30 A 3-phase delta (5-wire)[1]
  • Filament power supply input208 VAC ±10%, 3.5 A, 50/60 Hz, single-phase[2]
  • Filament power supply output10 VAC, 50 A, 28.5 kHz max.[2]
  • Filament power supply input220V AC ±10%, 6.25 A, 50/60 Hz, single-phase[1]
  • Filament power supply output10 V ac, 50 A, 40 kHz max. per source[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Temescal CV-12SLX?

The Temescal CV-12SLX is a 12 kW constant-voltage switching electron beam power supply designed to power and control up to two electron beam sources.[2][3]

What output range does the Temescal CV-12SLX provide?

The Temescal CV-12SLX delivers up to 10 kV at 0 to 1200 mA. The high voltage is adjustable from 0 to 10 kV. The emission current is adjustable from 0 to 1200 mA.[1][2][5]

Can the Temescal CV-12SLX work with different gun deflection types?

The Temescal CV-12SLX is compatible with electron beam sources that use either permanent or electromagnetic deflection.[1][2][3]

Not publicly documented

The following facts about the CV-12SLX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CV-12SLX are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the CV-12SLX are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the CV-12SLX are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CV-12SLX are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the CV-12SLX is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]e-beam.ferrotec.com — e-beam.ferrotec.come-beam.ferrotec.com
  2. [2]e-beam.ferrotec.com — e-beam.ferrotec.come-beam.ferrotec.com
  3. [3]CV-12SLX Electron Beam Power Supply - VACTEC GmbH — vactec-gmbh.devactec-gmbh.de
  4. [4]web.archive.org — web.archive.orgweb.archive.org
  5. [5]CV-12SLX Electron Beam Power Supply — scotech.ltd.ukscotech.ltd.uk
  6. [6]Temescal UEFC-4900 Deposition System — web.archive.orgweb.archive.org
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Last updated Oct 16, 2026.