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Tool family

Thermo Fisher Scientific FEI DualBeam 835 FIB-SEM

Thermo FisherMetrology & Inspection1 entry
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Models in this family

  1. Scientific FEI DualBeam 835 FIB-SEM

    The Thermo Fisher Scientific / FEI DualBeam 835 is a FIB-SEM with an SFeg electron column, Magnum ion column, CDEM detector, ETD/TLD detectors, a 5-axis motorized stage, an oil-free vacuum system, and one GIS of choice.