Waferpedia

Tool family

Thermo Fisher Scientific FEI Helios NanoLab 1200 HP FIB-SEM

Thermo FisherMetrology & Inspection1 entry
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Models in this family

  1. Scientific FEI Helios NanoLab 1200 HP FIB-SEM

    Thermo Fisher Scientific / FEI Helios NanoLab 1200 HP is a FIB-SEM (Focused Ion Beam - Scanning Electron Microscope) configured as a Full Wafer Dual Beam system.