Waferpedia
Waferpedia
/
Trion
/
Trion Sirus T 2 DRIE
Tool family
Trion Sirus T 2 DRIE
Trion
·
Etch
·
1 entry
LinkedIn
X
Email
Copy link
Models in this family
Sirus T 2 DRIE
The Trion Sirus T 2 is a deep reactive ion etch system.