Waferpedia

Tool family

Ultratech Spectrum 3 (2244 i)

UltratechLithography1 entry

Ultratech Spectrum 3 (2244 i) Stepper.

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Models in this family

  1. Spectrum 3 (2244 i)

    The Ultratech Spectrum 3 (2244 i) is a lithography stepper from Ultratech.