Waferpedia

Tool family

Ulvac CRYO

Ulvac2 entries
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Models in this family

  1. CRYO U 10 HL Cryopump
  2. CRYO U 8 HL Cryopump

    The Ulvac CRYO U 8 HL is a cryopump with a 9.5-inch outer diameter and an 8.375-inch inner diameter ISO flange.

All entries

  1. CRYO U 10 HL CryopumpUlvac
    2 specs
  2. CRYO U 8 HL CryopumpUlvac

    The Ulvac CRYO U 8 HL is a cryopump with a 9.5-inch outer diameter and an 8.375-inch inner diameter ISO flange.

    2 specs