Waferpedia

Tool family

Wyko DT4/DT6

The WYKO DT4/DT6 is a disk inspection system that uses a 1.06 µm laser for cassette-to-cassette flatness and parallelism inspection of disks.

Models in this family

  1. The WYKO DT4/DT6 is a disk inspection system that uses a 1.06 µm laser for cassette-to-cassette flatness and parallelism inspection of disks.