Yaskawa XU RSM 53 E 0 Atmospheric Wafer Robot

Models in this family

1. XU RSM 53 E 0 Atmospheric Wafer Robot

   The Yaskawa XU RSM 53 E 0 is an atmospheric wafer robot that handles 12-inch wafers, uses an XU-CM6180 controller, and is compatible with the Ebara FREX 300 CMP system.