Waferpedia

Tool family

YES 450PB-HV

The YES 450PB-HV is a high-vacuum cure oven for MEMS processing that uses high temperature and high vacuum to remove moisture and hydrogen.

Models in this family

  1. The YES 450PB-HV is a high-vacuum cure oven for MEMS processing that uses high temperature and high vacuum to remove moisture and hydrogen.

    Cited variants

    DesignationGenerationVintageChangesSource
    YES-450PB-HV (High Vac)Provides a degas and moisture abatement process for devices and getters/lids in a single tool; uses high temperature and high vacuum for complete moisture removal.web.archive.org[1]
    YES-450PB-HVHigh Vac version of the 450PB Series; described as providing high vacuum and high temperature for complete moisture removal.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org