Tool family
The YES 450PB-HV is a high-vacuum cure oven for MEMS processing that uses high temperature and high vacuum to remove moisture and hydrogen.
The YES 450PB-HV is a high-vacuum cure oven for MEMS processing that uses high temperature and high vacuum to remove moisture and hydrogen.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-450PB-HV (High Vac) | — | — | Provides a degas and moisture abatement process for devices and getters/lids in a single tool; uses high temperature and high vacuum for complete moisture removal. | web.archive.org[1] |
| YES-450PB-HV | — | — | High Vac version of the 450PB Series; described as providing high vacuum and high temperature for complete moisture removal. | web.archive.org[1] |