Waferpedia

Tool family

YES CV100PL

YESSingle Wafer Resist Stripper1 entry

The YES-CV100PL is a compact, fully automated downstream plasma stripper for 2 to 6 inch wafers.

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Models in this family

  1. CV100PL

    The YES-CV100PL is a compact, fully automated downstream plasma stripper for 2 to 6 inch wafers.