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YES

CV100PL

Single Wafer Resist Stripper2 to 6 in.YES CV100PL family
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YESCV100PL
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What is it?

The YES-CV100PL is described as a downstream plasma stripper in a compact, fully automated system. The source states it is designed for use with 2 to 6 inch wafers, includes automatic cassette-to-cassette loading and real-time temperature readout, and supports RS232 communication to a host computer.

What can it run?

Process applications and technology nodes documented for this tool.

  • wafer stripping
  • descum
  • plasma etching
  • plasma stripping
  • plasma descumming

What do the numbers mean?

Wafer handling3

Category
Single Wafer Resist Stripper[2]
Accurate?
Wafer size
2 to 6 in.[1]
Accurate?
Automation
fully automated; automatic, robotic, cassette-to-cassette loading[1]
Accurate?

Control & software1

Controller
touchscreen interfaced PLC controller[1]
Accurate?

Configuration & options4

Model
YES-CV100PL - APS[1]
Accurate?
Strip rate
up to 15,000 Å/min[1]
Accurate?
Electron shift in 200Å gate oxide
< 10 mV[1]
Accurate?
Communication
RS232 communication standard[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the CV100PL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CV100PL are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the CV100PL are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the CV100PL are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CV100PL are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the CV100PL is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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