Waferpedia

Tool family

YES CV100PZ

The YES-CV100PZ is a single wafer resist stripper with auto-detect wafer sizing for 6-8 inch wafers.

Models in this family

  1. The YES-CV100PZ is a single wafer resist stripper with auto-detect wafer sizing for 6-8 inch wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    YES-CV108web.archive.org[1]
    YES-CV100PL-APSwafer size: 2-6 in. (Auto Detect); strip rate up to 15,000 Å/min; < 10mV electron shift in 200Å Gate Oxide; RS232 communication standard; PLC Control / Touchscreen Interface; Patented Gas Swirl End Point Detectionweb.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org