Tool family
The YES-CV100PZ is a single wafer resist stripper with auto-detect wafer sizing for 6-8 inch wafers.
The YES-CV100PZ is a single wafer resist stripper with auto-detect wafer sizing for 6-8 inch wafers.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-CV108 | — | — | — | web.archive.org[1] |
| YES-CV100PL-APS | — | — | wafer size: 2-6 in. (Auto Detect); strip rate up to 15,000 Å/min; < 10mV electron shift in 200Å Gate Oxide; RS232 communication standard; PLC Control / Touchscreen Interface; Patented Gas Swirl End Point Detection | web.archive.org[1] |