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YES

CV100PZ

Single Wafer Resist Stripper6-8 in. (Auto Detect)YES CV100PZ family
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CV100PZ — web.archive.org
Fig. 01CV100PZweb.archive.org[1]

  • Plate 01Yield Engineering CV100PZ Stripper - 6 inch Wafer Upgrade

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  • Plate 02Yield Engineering CV100PZ Stripper

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What is it?

The source lists YES-CV100PZ under Single Wafer Resist Stripper products and specifies a wafer size of 6-8 in. with auto detect. It also states a strip rate up to 20,000 Å/min, patented gas swirl end point detection of resist and polymide removal, mass flow controllers, and PLC control with touchscreen interface.

What can it run?

Process applications and technology nodes documented for this tool.

  • Resist stripping
  • Polymide removal

What do the numbers mean?

Wafer handling1

Wafer size
6-8 in. (Auto Detect)[1]
Accurate?

Gas & chemistry2

End point detection
Patented Gas Swirl End Point Detection of Resist and Polymide Removal[1]
Accurate?
Controls
Mass Flow Controllers; PLC Control / Touchscreen Interface[1]
Accurate?

Configuration & options2

Model
YES-CV100PZ[1]
Accurate?
Strip rate
up to 20,000 Å/min[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
YES-CV108———web.archive.org[1]
YES-CV100PL-APS——wafer size: 2-6 in. (Auto Detect); strip rate up to 15,000 Å/min; < 10mV electron shift in 200Å Gate Oxide; RS232 communication standard; PLC Control / Touchscreen Interface; Patented Gas Swirl End Point Detectionweb.archive.org[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • End point detectionPatented Gas Swirl End Point Detection of Resist and Polymide Removal[1]
  • ControlsMass Flow Controllers; PLC Control / Touchscreen Interface[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the CV100PZ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CV100PZ are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the CV100PZ are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CV100PZ are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the CV100PZ is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the CV100PZ are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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