Waferpedia

Tool family

YES CV200

YESPlasma Strip/Descum System1 entry

The CV200RF Series is a plasma strip/descum system line with automated wafer handling, used for photoresist removal, polyimide removal, organics removal, CD master cleaning, and descum processes.

Email

Models in this family

  1. CV200

    The CV200RF Series is a plasma strip/descum system line with automated wafer handling, used for photoresist removal, polyimide removal, organics removal, CD master cleaning, and descum processes.

    Cited variants

    DesignationGenerationVintageChangesSource
    YES-CV200RF——Listed as having automated wafer handling.web.archive.org[1]
    YES-CV200RFS——Listed as a model in the CV200RF Series.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org