YES CV200

Models in this family

1. 

   CV200

   The CV200RF Series is a plasma strip/descum system line with automated wafer handling, used for photoresist removal, polyimide removal, organics removal, CD master cleaning, and descum processes.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   YES-CV200RF	—	—	Listed as having automated wafer handling.	web.archive.org[1]
   YES-CV200RFS	—	—	Listed as a model in the CV200RF Series.	web.archive.org[1]

Sources