Waferpedia

Tool family

YES CV200RF

YESPlasma strip/descum system1 entry

The CV200RF is a YES plasma stripping system described as an automated wafer-handling tool for stripping photoresist and polyimide and for descumming and organics removal.

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Models in this family

  1. CV200RF

    The CV200RF is a YES plasma stripping system described as an automated wafer-handling tool for stripping photoresist and polyimide and for descumming and organics removal.

    Cited variants

    DesignationGenerationVintageChangesSource
    YES-CV200RFS———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org