Waferpedia

YES

CV200RF

Plasma strip/descum systemYES CV200RF family
Research Quality: 40% complete
LinkedIn X Email
CV200RF — web.archive.org
Fig. 01CV200RFweb.archive.org[1]

What is it?

Sources describe the YES-CV200RF as part of the Plasma Strip/Descum Systems line. It is described as an automated, user-friendly plasma stripping system with automated wafer handling, used for removing thick layers of photoresist and polyimide, with a selectable descum function for gentler cleaning operations.

What can it run?

Process applications and technology nodes documented for this tool.

  • Photoresist removal
  • Polyimide removal
  • Organics removal
  • Etching
  • Surface preparation
  • CD master cleaning
  • Descumming

What do the numbers mean?

Wafer handling1

Handling
Automated wafer handling[3]
Accurate?

Gas & chemistry1

Primary materials removed
Photoresist and polyimide[2]
Accurate?

Configuration & options3

Model
YES-CV200RF[2]
Accurate?
Series
CV200RF Series[1]
Accurate?
Process type
Plasma stripping / descum[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
YES-CV200RFS———web.archive.org[2]
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Primary materials removedPhotoresist and polyimide[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the CV200RF are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CV200RF are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the CV200RF are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CV200RF are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the CV200RF is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the CV200RF are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]web.archive.org — web.archive.orgweb.archive.org
Was this page accurate?

Last updated Jul 29, 2026.