Waferpedia

Tool family

Zygo 8070-0102-05 7702

Zygo 8070-0102-05 7702 Interferometer Laser.

Models in this family

  1. The Zygo 8070-0102-05 / 7702 is an interferometer laser compatible with Canon FPA 2500, FPA 3000, and FPS 5550.