Zygo
8070-0102-05 7702
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Zygo 8070-0102-05 / 7702 is an interferometer laser. The Zygo 8070-0102-05 / 7702 is compatible with Canon FPA 2500, FPA 3000, and FPS 5550.[1][2]
What it is
How it works
General reference — not yet source-verifiedAn interferometer laser generates a coherent light beam that is split into a reference path and a measurement path.
The reference beam reflects from a fixed mirror, while the measurement beam reflects from the target surface or moving stage.
Where it fits in the process flow
General reference — not yet source-verifiedInterferometer lasers serve as core alignment and position-feedback components inside photolithography steppers and scanners.
Within the stepper, the laser module provides the displacement measurement needed for precise stage positioning and mask-to-wafer alignment.
Applications
What do the numbers mean?
Optics & imaging1
Configuration & options6
- Compatible with Canon FPA 2500, FPA 3000, & FPS 5550 iZ Part Number: BG 4 5372 020[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 8070-0102-05 7702 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8070-0102-05 7702 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 8070-0102-05 7702 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 8070-0102-05 7702 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 8070-0102-05 7702 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 8070-0102-05 7702 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 15, 2026.
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