Waferpedia

Tool family

Zygo Mark GPI

Models in this family

  1. Zygo Mark GPI Wafer Inspection is a wafer inspection system described as high resolution and equipped with two cameras.

All entries

  1. Mark GPI WaferZygo

    Zygo Mark GPI Wafer Inspection is a wafer inspection system described as high resolution and equipped with two cameras.

    CategoryMetrology & Inspection
    4 specs
  2. Mark GPI XPSZygo
    CategoryPrecision Optics
    1 spec