Zygo MicroLUPI

Models in this family

1. MicroLUPI

   The Zygo MicroLUPI is an interferometer with a frequency-stabilized helium-neon laser and motorized Z and X/Y stages.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   RS-633	—	—	Reflected mode configuration.	lambdaphoto.co.uk[1]
   RSx-633	—	—	Reflected mode plus radius-of-curvature capabilities.	lambdaphoto.co.uk[1]

Sources