Waferpedia

Manufacturer

Headway

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9 entries

  1. EC-101Headway
    CategoryPhotoresist spin station
  2. PWM 32 PS CB 15Headway
  3. PWM 32 PS R 790 SpinHeadway
  4. EC-101DHeadway

    General referenceHeadway EC-101D is a photoresist spin station. Machines of this class are used to apply thin, uniform liquid films to substrates by rotational spreading before downstream lithography processing.

    Categoryphotoresist spin station
  5. PWM 32 PS CB 15 SpinnerHeadway

    Headway PWM 32 PS CB 15 Spinner is a spinner used with organic solvents and a vacuum stage, operating at 115 Vac and 50/60 Hz.

    CategoryWet Processing / Clean
  6. PWM32Headway

    The Headway PWM32 is a spinner spin controller that was later upgraded to the PWM50.

    Categoryspin controller
    Legacy
  7. PW32Headway

    The Headway PW32 is a spinner controller with quick-start sequence programming for recipes and steps.

    CategorySpinner controller
  8. 1 EC 101 D CB 15 Photoresist SpinnerHeadway
  9. 1 EC 101 R 485 Photoresist SpinnerHeadway

    Headway 1 EC 101 R 485 is a photoresist spinner with stated vacuum and electrical requirements.