Waferpedia

Agilent

7500 Series ICP-MS

7500 Series ICP-MS — Inventory photo
Fig. 017500 Series ICP-MSInventory photo[1]

Wafer size

Wafer Cooling

Power

200 - 240 V, 24 A[1]

Vacuum

Pressure Monitor[1]

Gas delivery

Gas Pallet Configuration:[1]

What it is

General reference — not yet source-verified

ICP-MS is an analytical instrument class used to measure trace elemental composition by converting a sample into an ionized form and then separating the resulting ions by mass-to-charge behavior. Within a fab or lab environment, this class of equipment is used for contamination analysis, process monitoring, and material characterization rather than wafer fabrication itself.

How it works

General reference — not yet source-verified

The machine uses an inductively coupled plasma source to atomize and ionize material from a sample, then a mass spectrometer section separates the ions for detection. That architecture allows elemental species to be distinguished by mass-to-charge ratio after the sample has been converted into a high-energy plasma state.

In semiconductor and precision-optics workflows, this kind of instrument is generally built around sample introduction, plasma ionization, ion optics, mass separation, and detector readout. The result is a measurement tool for quantifying elemental impurities and composition in liquids, digests, or other prepared samples rather than a direct patterning or deposition tool.

Where it fits in the process flow

General reference — not yet source-verified

This equipment sits in the analytical and metrology portion of the workflow, supporting incoming material checks, process control, and failure analysis. It is used after samples have been collected or prepared and before results are fed back into process tuning or contamination control.

Applications

General reference — not yet source-verified

The Agilent 7500 Series ICP-MS is used for elemental trace analysis in semiconductor and related precision-optics work, where low-level contamination and composition control matter. Typical uses include monitoring metals and other impurities in process chemicals, rinse water, substrates, and prepared samples.

It is suited to laboratory-style analytical work associated with quality control, materials characterization, and contamination investigation. In that role it supports process engineers by identifying elemental signatures that can affect device yield or optical performance.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Missing peristaltic tubing & pump

What do the numbers mean?

Power & electrical3

Line Voltage
200 - 240 V, 24 A[1]
Accurate?
Line Frequency
50 / 60 Hz[1]
Accurate?
RF Generator[1]
Accurate?

Vacuum & pumping3

Pressure Monitor[1]
Accurate?
Turbo Pump[1]
Accurate?
Reduce Pressure Capability[1]
Accurate?

Wafer handling1

Wafer size
Wafer Cooling[1]
Accurate?

Gas & chemistry3

Gas Pallet Configuration:[1]
Accurate?
Ar MFC Size
Optional[1]
Accurate?
N2 MFC
Optional[1]
Accurate?

Configuration & options10

For Parts[1]
Accurate?
Chamber A - DPN:[1]
Accurate?
Manometer[1]
Accurate?
Ground VDE[1]
Accurate?
No RGA Port[1]
Accurate?
Chamber B - ISSG:[1]
Accurate?
No RGA Port and Valve[1]
Accurate?
No Toxic Chamber[1]
Accurate?
No ISPM Prep[1]
Accurate?
No Oxygen Analyzer[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Line Voltage200 - 240 V, 24 A[1]
  • Line Frequency50 / 60 Hz[1]
  • ConfigurationRF Generator[1]
  • ConfigurationPressure Monitor[1]
  • ConfigurationTurbo Pump[1]
  • ConfigurationGas Pallet Configuration:[1]
  • Ar MFC SizeOptional[1]
  • N2 MFCOptional[1]
  • ConfigurationReduce Pressure Capability[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What is the model name?

Agilent / Varian 7500 Series ICP-MS.[1]

What type of instrument is it?

It is an inductively coupled plasma mass spectrometer.[1]

Not publicly documented

The following facts about the 7500 Series ICP-MS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 7500 Series ICP-MS are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 7500 Series ICP-MS are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 7500 Series ICP-MS are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the 7500 Series ICP-MS is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 7500 Series ICP-MS are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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