Agilent

Wafer size
Wafer Cooling
Power
200 - 240 V, 24 A[1]
Vacuum
Pressure Monitor[1]
Gas delivery
Gas Pallet Configuration:[1]
ICP-MS is an analytical instrument class used to measure trace elemental composition by converting a sample into an ionized form and then separating the resulting ions by mass-to-charge behavior. Within a fab or lab environment, this class of equipment is used for contamination analysis, process monitoring, and material characterization rather than wafer fabrication itself.
The machine uses an inductively coupled plasma source to atomize and ionize material from a sample, then a mass spectrometer section separates the ions for detection. That architecture allows elemental species to be distinguished by mass-to-charge ratio after the sample has been converted into a high-energy plasma state.
In semiconductor and precision-optics workflows, this kind of instrument is generally built around sample introduction, plasma ionization, ion optics, mass separation, and detector readout. The result is a measurement tool for quantifying elemental impurities and composition in liquids, digests, or other prepared samples rather than a direct patterning or deposition tool.
This equipment sits in the analytical and metrology portion of the workflow, supporting incoming material checks, process control, and failure analysis. It is used after samples have been collected or prepared and before results are fed back into process tuning or contamination control.
The Agilent 7500 Series ICP-MS is used for elemental trace analysis in semiconductor and related precision-optics work, where low-level contamination and composition control matter. Typical uses include monitoring metals and other impurities in process chemicals, rinse water, substrates, and prepared samples.
It is suited to laboratory-style analytical work associated with quality control, materials characterization, and contamination investigation. In that role it supports process engineers by identifying elemental signatures that can affect device yield or optical performance.
Documented failure modes, common issues, and field considerations.
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
No research found yet — worked with this tool? Share what you know.
The following facts about the 7500 Series ICP-MS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 7500 Series ICP-MS are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 7500 Series ICP-MS are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 7500 Series ICP-MS are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 7500 Series ICP-MS is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 7500 Series ICP-MS are on record.
Answerable by: an OEM parts catalog or a service engineer
Last updated Jul 29, 2026.
The Perkin Elmer 1050 UV-VIS Spectrometer is an instrument used for analyzing ultraviolet and visible light absorption spectra.
The Agilent 11980 A is a Fiber Optic Interferometer covering the wavelength range of 1250-1600 nm.