Blue M
AC 7602 TDA 3 Temperature Humidity
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Blue M AC 7602 TDA 3 is a temperature/humidity chamber used for environmental testing. Blue M AC 7602 TDA 3 has a 5 cubic foot interior and operates from 40°C to 93°C with humidity from 40% to 95%RH.[1][2]
What it is
The Blue M AC 7602 TDA 3 is a temperature/humidity chamber. The chamber is specified for use with 8-inch wafer sizes. The chamber has a capacity of 5 cubic feet with interior dimensions 24 inches wide by 18 inches deep by 20 inches high. Exterior dimensions are 42 inches wide by 37 inches deep by 46 inches high.[1][2]
What do the numbers mean?
Power & electrical1
Wafer handling1
Control & software1
Dimensions & facilities2
Configuration & options7
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Electrical120vac, 1ph, 20a[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the temperature range of the Blue M AC 7602 TDA 3?
The temperature range is 40°C to 93°C.[2]
What is the humidity range of the chamber?
The humidity range is 40% to 95% relative humidity.[2]
Does the chamber require a water supply?
Yes, the chamber requires a water supply for humidity operations.[2]
What wafer sizes does the chamber accommodate?
The chamber is specified for 8-inch wafer sizes.[1]
Not publicly documented
The following facts about the AC 7602 TDA 3 Temperature Humidity are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AC 7602 TDA 3 Temperature Humidity are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AC 7602 TDA 3 Temperature Humidity are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AC 7602 TDA 3 Temperature Humidity are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AC 7602 TDA 3 Temperature Humidity are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AC 7602 TDA 3 Temperature Humidity is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]acesinc.com — acesinc.comacesinc.com
Last updated Sep 1, 2026.
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