Waferpedia

Bruker

Contour GTX White Light

Precision Optics
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Bruker Contour GTX is a White Light Interferometer (WLI). The Bruker Contour GTX uses white light interferometry for surface measurement.[1]

BrukerContour GTX White Light
No photo available yet

What it is

The Bruker Contour GTX is a white light interferometer (WLI) manufactured by Bruker.[1]

Where it fits in the process flow

General reference — not yet source-verified

White light interferometers are used in semiconductor fabrication for in-line metrology after chemical mechanical planarization (CMP) to measure dishing and erosion. The instruments also measure thin-film thickness, step heights, and surface roughness on patterned wafers. In optics manufacturing, white light interferometers characterize surface figure and roughness of lenses, mirrors, and prisms.

Applications

General reference — not yet source-verified

Applications of white light interferometry include measuring surface roughness, step heights, film thickness, and defect dimensions on semiconductor wafers, MEMS devices, and precision optics. The technique is non-destructive and can handle transparent films and steep slopes.

What do the numbers mean?

Configuration & options2

Technology
White Light Interferometry (WLI)[1]
Accurate?
Vintage (year of manufacture examples)
2013, 2016[1]
Accurate?
Interested in this tool?
Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Contour GTX White Light are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the Contour GTX White Light are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Contour GTX White Light are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Contour GTX White Light are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Contour GTX White Light are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Contour GTX White Light are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
Was this page accurate?

Last updated Aug 20, 2026.

Compare with similar tools

View all →