Waferpedia

Bruker

profilometer2

Surface profilerBruker profilometer2 family
Research Quality: 40% complete
LinkedIn X Email
profilometer2 — uwaterloo.ca
Fig. 01profilometer2uwaterloo.ca[1]

What is it?

The source identifies this equipment as a Bruker surface profiler with model Dektak Pro-S. It is described as a stylus-based scanning system used for measuring surface topography and thin and thick film step heights, with electromechanical measurement using a diamond-tipped stylus.

What can it run?

Process applications and technology nodes documented for this tool.

  • Measuring surface topography
  • Measuring thin film step heights
  • Measuring thin and thick film step heights

What do the numbers mean?

Control & software2

Software
Vision64 measurement and analysis software[1]
Accurate?
Levelling
Manual levelling and sample rotation; two-point programmable or cursor software levelling[1]
Accurate?

Dimensions & facilities1

Equipment description
Thin and thick film step height measurement tool[1]
Accurate?

Configuration & options9

Vendor
Bruker[1]
Accurate?
Model
Dektak Pro-S[1]
Accurate?
Purpose
Stylus-based scanning system for measuring surface topography and thin film step heights[1]
Accurate?
Measurement method
Electromechanical measurement using a diamond-tipped stylus moved over the sample surface[1]
Accurate?
Stylus link
Linear Variable Differential Transformer (LDVT)[1]
Accurate?
Stylus size
2 μm[1]
Accurate?
Sample-positioning stage
Two-axis, manual sample-positioning stage with 4″ x 4″ of X-Y translation[1]
Accurate?
Maximum sample thickness
55 mm[1]
Accurate?
Maximum scan length
2.16″[1]
Accurate?
Interested in this tool?
Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the profilometer2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the profilometer2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the profilometer2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the profilometer2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the profilometer2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the profilometer2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]uwaterloo.ca — uwaterloo.cauwaterloo.ca
  2. [2]Main cleanroom | Quantum-Nano Fabrication and Characterization Facility | University of Waterloo — uwaterloo.cauwaterloo.ca
Was this page accurate?

Last updated Jul 29, 2026.