Waferpedia

Dektak

3030

Surface ProfilerDektak 3030 family
Research Quality: 10% complete
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Dektak3030
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  • Plate 01Dektak 3030 Demo video

    Ollie Dunne Tara SemiWatch on YouTube

  • Plate 02Sitek Process Solutions - Dektak 3030 Profilometer Source Inspection

    Sitek Process SolutionsWatch on YouTube

What is it?

The sources identify the Dektak 3030 as a surface profiler under the metrology and testing/inspection equipment sections. No additional specifications, wafer-size compatibility, lifecycle information, or control-era details are stated in the provided sources.

What do the numbers mean?

Configuration & options2

Model
3030[1]
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Equipment name
Dektak 3030 Surface Profiler[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 3030 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the 3030 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3030 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 3030 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 3030 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 3030 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edu — nanolab.berkeley.edunanolab.berkeley.edu
  2. [2]Capabilities — nanolab.berkeley.edunanolab.berkeley.edu
  3. [3]Metrology — nanolab.berkeley.edunanolab.berkeley.edu
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Last updated Jul 29, 2026.