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Denton Vacuum

CC-105

Ion sourceDenton Vacuum CC-105 family
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CC-105 — web.archive.org
Fig. 01CC-105web.archive.org[1]

Power

+800 V peak[2]

Gas delivery

O2, Ar, N2, others[2]

What is it?

The Denton Vacuum CC-105 is a broad beam cold cathode ion source designed for ion-assisted evaporation processes.

What can it run?

Process applications and technology nodes documented for this tool.

  • Ion-assisted evaporation (IAD) processes
  • Reactive processes utilizing oxygen or nitrogen
  • Optical coating systems

What do the numbers mean?

Power & electrical8

Plasma power supply output voltage
+800 V peak[2]
Accurate?
Plasma power supply output current
3.5 A peak[2]
Accurate?
Plasma power supply electrical connection
220 V (or 400 V)[2]
Accurate?
Plasma power supply size
19 in x 5 in high[2]
Accurate?
Neutralizer power supply output voltage
-30 V[2]
Accurate?
Neutralizer power supply output current
30 A[2]
Accurate?
Neutralizer power supply electrical connection
230 V[2]
Accurate?
Neutralizer power supply size
19 in x 1.75 in high[2]
Accurate?

Gas & chemistry1

Gases
O2, Ar, N2, others[2]
Accurate?

Configuration & options7

Ion source aperture
37 mm[2]
Accurate?
Ion drive current
0 - 3.5 A[2]
Accurate?
Ion energy
50 - 800 eV[2]
Accurate?
Ion source size
90 mm / 175 mm[2]
Accurate?
Compatibility
100% O2 compatible[1]
Accurate?
Design feature
Broad beam cold cathode ion source[1]
Accurate?
Designed for
Ion-assisted evaporation (IAD) processes[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • GasesO2, Ar, N2, others[2]
  • Plasma power supply output voltage+800 V peak[2]
  • Plasma power supply output current3.5 A peak[2]
  • Plasma power supply electrical connection220 V (or 400 V)[2]
  • Plasma power supply size19 in x 5 in high[2]
  • Neutralizer power supply output voltage-30 V[2]
  • Neutralizer power supply output current30 A[2]
  • Neutralizer power supply electrical connection230 V[2]
  • Neutralizer power supply size19 in x 1.75 in high[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the CC-105 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CC-105 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the CC-105 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the CC-105 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CC-105 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the CC-105 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.