Filmetrics
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The Filmetrics F-40-UV is a microscope-mounted thin-film measurement system that uses optical reflectometry to non-destructively measure thin-film thicknesses in small patterned areas. The F-40-UV acquires reflection spectra between 400-900 nm and performs curve-fitting to determine thickness and refractive index. The F-40-UV is capable of measuring film thicknesses from several micrometers down to 4 nm.[1][2]
The F-40-UV acquires reflection spectra between 400 and 900 nm using a halogen microscope light source. The spectrometer is capable of detecting wavelengths down to approximately 190 nm, but the standard light source does not support that range. The microscope mounts multiple objectives to provide different measurement spot sizes. The Filmetrics software performs curve-fitting to determine thin-film thickness and refractive index.[2][1]
Typical applications of the F-40-UV include thickness verification of deposited or etched films, determination of optical constants (refractive index and extinction coefficient), and process characterization of patterned substrates.[1]
The system is also used to measure residual film thickness after etching, allowing verification of etch completion in small patterned areas.[2]
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Yes, the microscope mounting allows measurement in small patterned areas.[2]
The following facts about the F-40-UV are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F-40-UV are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the F-40-UV are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F-40-UV are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the F-40-UV is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F-40-UV are on record.
Answerable by: an OEM parts catalog or a service engineer
Last updated Aug 13, 2026.