F10-VC

The Filmetrics F10-VC is a simultaneous reflectance and transmittance measurement instrument. The F10-VC captures reflectance and transmittance spectra with a single mouse click. The F10-VC can report minimum and maximum values, determine FWHM, and perform color analysis. Optional thickness and index measurement modules extend the instrument with analytical functions also associated with the Filmetrics F20. The standard F10-VC model is specified with a thickness range of 15 nm to 70 µm and a wavelength range of 380 nm to 1050 nm.^[1]

The F10-VC includes an integrated spectrometer and light source unit. Each F10-VC model includes the hardware and software required to connect to a computer and make simultaneous reflectance and transmittance measurements. The package includes FILMeasure 5.0 software, BK-7 reference material, Al2O3 reference material, a Si reference material, an anti-reflector, an operator's manual, connecting cables, and lens paper.^[1]

Tools in this class are typically used after a film has been deposited, cured, grown, or otherwise formed on a substrate. Process engineers use this kind of measurement to check whether a coating meets optical targets before later steps such as additional deposition, etch, bonding, dicing, assembly, or final optical verification. The same style of measurement can also be used during process development to tune recipes and compare runs.

In semiconductor, optics, and related coating work, instruments of this class are used on transparent or semitransparent films whose spectral behavior is part of the process target. Common use cases include checking coated glass, dielectric stacks, hard coatings, display-related layers, optical filters, and process monitor samples. Simultaneous measurement of reflected and transmitted light is especially relevant when both loss channels matter to the intended film function.