Headway
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The Headway EC-101D is a photoresist spin station. The Headway EC-101D has adjustable spin speeds from 50 to 10,000 RPM. The Headway EC-101D has a manual control with an automated timer.[1][2]
Plate 01Headway Research 1-EC101D-R485 Spin Coater #59426
The Headway EC-101D is a photoresist spin station. The Headway EC-101D has adjustable spin speeds from 50 to 10,000 RPM. The Headway EC-101D is manually controlled with an automated timer. The Headway EC-101D has an LCD motor speed readout. The Headway EC-101D has vacuum hold down chucks for alternate substrate sizes, fail-safe vacuum interlocks, bowl exhaust, removable bowl liners, and automatic dynamic breaking.[1][2][3]
The Headway EC-101D uses vacuum hold down chucks for alternate substrate sizes. The Headway EC-101D includes fail-safe vacuum interlocks. The Headway EC-101D includes bowl exhaust and removable bowl liners. The Headway EC-101D includes automatic dynamic breaking. The Headway EC-101D uses manual control with an automated timer and provides an LCD motor speed readout.[1][2]
Photoresist spin stations sit in the lithography preparation flow before exposure and development. Photoresist spin stations are used after substrate preparation and before the coated surface proceeds to soft bake, alignment, exposure, and later wet processing.
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The Headway EC-101D has adjustable spin speeds from 50 to 10,000 RPM.[1][2]
The Headway EC-101D is manually controlled with an automated timer and has an LCD motor speed readout.[1][2]
The Headway EC-101D uses vacuum hold down chucks for alternate substrate sizes and includes fail-safe vacuum interlocks.[1][2]
The Headway EC-101D includes bowl exhaust, removable bowl liners, and automatic dynamic breaking.[1][2]
The operating procedure limits the bench to photoresists. The operating procedure directs other polymeric materials and spin-on glasses to a separate polymer spin station, and it prohibits acids, caustics, and developer in the bench.[1][2]
The following facts about the EC-101D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EC-101D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EC-101D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EC-101D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EC-101D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EC-101D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 17, 2026.