Keysight 5517

Models in this family

1. 5517 A

   The Keysight 5517A is a Class II helium-neon laser source providing stable 633 nm wavelength light for precision dual-frequency interferometry.

2. 5517 B

   The Keysight / Agilent 5517 B is an interferometer laser.

3. 5517 C

   The Keysight/Agilent 5517 C is a laser compatible with ASML PAS 5500 systems.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   5517C	—	—	Option C01 is stated in the source record.	waferpedia.com[1]

4. 

   5517 C He-Ne

   The Keysight / Agilent 5517 C is a HeNe (helium-neon) laser with an Option C01 configuration.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   5517 C (Option C01)	—	2006	Includes option C01 as stated in the source.	Equipment inventory listing[2]

5. 5517 D

   The Keysight / Agilent 5517 D is a laser compatible with the ASML PAS 5500 lithography system.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   5517D	—	—	Laser head with 1012 mm/s maximum linear velocity, 918 MHz reference frequency, 3.4 to 4.0 μW minimum output power, > 180 min warm-up time, and 6 mm or 9 mm available laser beam diameter.	keysight.com[3]

Sources