Waferpedia

Laurell

WS-1000MH

Mini wet stationLaurell WS-1000MH family
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WS-1000MH — web.archive.org
Fig. 01WS-1000MHweb.archive.org[1]

Vacuum

Exhaust plenum with gauge[1]

Gas delivery

Chemical heating[1]

What is it?

The WS-1000MH Mini Wet Station is described as part of the Laurell WS-1000MH series of mini spin-process stations, designed to fit tighter spaces and smaller budgets. The source lists dimensions, construction and process-related features, and several optional additions.

What do the numbers mean?

Vacuum & pumping5

Exhaust plenum with gauge[1]
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Isolated component/drawer below for heaters, pumps, vessels[1]
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Processor exhaust interlock and control (standard on some models)[1]
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Through pressure vessel material stirring (magnetic)[1]
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Vacuum loading wand[1]
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Wafer handling1

Wafer cassette stand[1]
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Gas & chemistry1

Chemical heating[1]
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Control & software1

Touch Screen Control Interface[1]
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Dimensions & facilities1

Dimensions
24" W x 43 3/8" D x 74 1/4" H (61.0cm W x 110.04cm D x 188.60cm H)[1]
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Configuration & options10

Construction
All polypropylene construction (WS-1000MH-WPP)[1]
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Accommodates the installation of any Laurell spin processor[1]
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Perforated wet-deck (easily removable)[1]
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Wet plenum[1]
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Available without fume hood for more benign process requirements[1]
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Rinse to resistivity[1]
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Drain diverter(s)[1]
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Leak detection[1]
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Light towers[1]
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Advanced material variant
WS-1000MH-CP7-D flame retardant polypropylene formulation meeting FMRC 4910 testing standards and low-smoke/minimal-toxic-by-products requirements[1]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
WS-1000MH-WPP——All polypropylene constructionweb.archive.org[1]
WS-1000MH-CP7-D——Flame retardant polypropylene formulation meeting FMRC 4910 testing standards and low-smoke/minimal-toxic-by-products requirementsweb.archive.org[1]
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What replaced it?

  • siblingLaurell WS-1000— The page says this model is the mini station and asks whether a larger 4-foot station should be considered instead, linking to WS-1000.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • FeatureExhaust plenum with gauge[1]
  • FeatureIsolated component/drawer below for heaters, pumps, vessels[1]
  • OptionProcessor exhaust interlock and control (standard on some models)[1]
  • OptionThrough pressure vessel material stirring (magnetic)[1]
  • OptionChemical heating[1]
  • OptionVacuum loading wand[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the WS-1000MH are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-1000MH are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the WS-1000MH are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WS-1000MH are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WS-1000MH is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the WS-1000MH are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.