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Laurell

WS-1000

Wet StationLaurell WS-1000 family
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WS-1000 — web.archive.org
Fig. 01WS-1000web.archive.org[1]

What is it?

The Laurell WS-1000 Wet Station is described as part of the WS-1000 Series Spin-Process Stations, which allow a fully configured and tested module to be shipped complete and are designed to be easy to load and operate. The source lists its dimensions, typical processes, construction features, and available options.

What can it run?

Process applications and technology nodes documented for this tool.

  • Coating
  • Etching
  • Developing
  • Cleaning
  • Rinsing
  • Drying

What do the numbers mean?

Vacuum & pumping3

Exhaust plenum
Exhaust plenum with gauge[1]
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Component storage
Isolated component/drawer below for heaters, pumps, vessels[1]
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Options
Touch screen control interface; processor exhaust interlock (standard on EDC models); chemical heating; through pressure vessel material stirring (magnetic); rinse to resistivity; drain diverter(s); vacuum loading wand; wafer cassette stand; leak detection; light towers[1]
Accurate?

Gas & chemistry1

Typical processes
Coating; etching; developing (aqueous/solvent); cleaning (aqueous/solvent); sulfuric/peroxide (in situ mixing); HBr; temperature-controlled developing; rinsing/drying[1]
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Dimensions & facilities1

Dimensions
48" W x 43 3/8" D x 74 1/4" H (121.9cm W x 110.04cm D x 188.60cm H)[1]
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Configuration & options5

Construction
All-polypropylene construction[1]
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Compatible installation
Accommodates the installation of any Laurell spin processor[1]
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Wet deck
Perforated wet-deck (easily removable)[1]
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Wet plenum
Wet plenum[1]
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Advanced material option
WS-1000-CP7-D flame retardant polypropylene formulation[1]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
WS-1000-CP7-D——Flame retardant polypropylene formulation meeting FMRC 4910 testing standards for flame retardation, self-extinguishing characteristics, and burn-through; also stated to meet or exceed standards for low smoke generation and minimal toxic by-products.web.archive.org[1]
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What replaced it?

  • siblingLaurell WS-1000MH— The page says this model is the mini station and asks whether a larger 4-foot station should be considered instead, linking to WS-1000.source[3]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Typical processesCoating; etching; developing (aqueous/solvent); cleaning (aqueous/solvent); sulfuric/peroxide (in situ mixing); HBr; temperature-controlled developing; rinsing/drying[1]
  • Exhaust plenumExhaust plenum with gauge[1]
  • Component storageIsolated component/drawer below for heaters, pumps, vessels[1]
  • OptionsTouch screen control interface; processor exhaust interlock (standard on EDC models); chemical heating; through pressure vessel material stirring (magnetic); rinse to resistivity; drain diverter(s); vacuum loading wand; wafer cassette stand; leak detection; light towers[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the WS-1000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-1000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the WS-1000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WS-1000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WS-1000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the WS-1000 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.