Leica

ACE600

Sample coater for scanning electron imaging 4"Leica ACE600 family

Research Quality: 30% complete

LeicaACE600

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Plate 01How to use the Leica Ace600 coater
Georgia Electron MicroscopyWatch on YouTube
Plate 02Leica EM ACE600
Leica MicrosystemsWatch on YouTube
Plate 03Leica EM ACE600 Sputter Coating Workflow
MWAC EMU videosWatch on YouTube
Plate 04Leica EM ACE600 table-top coater with Leica VCT100
Leica MicrosystemsWatch on YouTube
Plate 05In the microscopist's pocket: How to make a coating recipe with the Leica Ace 600 coater
Georgia Electron MicroscopyWatch on YouTube

What is it?

The Leica EM ACE600 is described as a versatile high-vacuum film deposition instrument for FE-SEM applications and as a sputter coater dedicated to depositing thin iridium films before SEM imaging. It can handle samples mounted on aluminum SEM stubs or unmounted samples up to 4" diameter, and it may use a quartz crystal thickness monitor or timed deposition.

What can it run?

Process applications and technology nodes documented for this tool.

SEM sample imaging
FE-SEM applications

Why won't it start?

Documented failure modes, common issues, and field considerations.

A thin conductive film can improve SEM image quality on samples where charging is an issue, without obscuring underlying surface features.

What do the numbers mean?

Vacuum & pumping1

Purpose: Versatile high vacuum film deposition instrument for field-effect scanning electron microscope (FE-SEM) applications^[1]

Configuration & options8

OEM: Leica^[1]
Model: Leica EM ACE600^[1]
Deposition type: Sputter coater^[1]
Deposited material: Thin films of iridium^[1]
Sample capacity: Samples mounted on aluminum SEM stubs or unmounted samples^[1]
Maximum sample diameter: 4"^[1]
Stage holder configuration: Pin-style SEM stubs^[1]
Optional features: Quartz crystal thickness monitor or timed deposition^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

PurposeVersatile high vacuum film deposition instrument for field-effect scanning electron microscope (FE-SEM) applications^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the ACE600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACE600 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ACE600 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ACE600 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the ACE600 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ACE600 are on record.
Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]uwaterloo.ca — uwaterloo.cauwaterloo.ca
[2]https://www.nanofab.utah.edu/wp-content/uploads/2022/08/tool-list.pdf — nanofab.utah.edunanofab.utah.edu
[3]https://www.nanofab.utah.edu/wp-content/uploads/2025/07/Utah-Nanofab-tool-list-July-2025-1.pdf — nanofab.utah.edunanofab.utah.edu

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Last updated Jul 29, 2026.