Waferpedia

MRSI

M5

Assembly Work CellMRSI M5 family
Research Quality: 40% complete
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M5 — web.archive.org
Fig. 01M5web.archive.org[1]

Performance

5 µm, 3 sigma[1]

Gas delivery

Nitrogen, Argon or N2-H2 or Ar-H2[1]

Control era

Windows

What is it?

The MRSI-M5 is described as an assembly work cell for semiconductor and electronic packaging applications. The source states that it supports complex epoxy die attach, eutectic, and flip chip bonding, and that it can be configured for wafer handling, dispense, stamping, and other assembly functions.

What can it run?

Process applications and technology nodes documented for this tool.

  • Semiconductor and electronic packaging
  • Microwave modules
  • MEMS
  • Advanced semiconductor packages
  • Multi-chip modules
  • Hybrid devices
  • Photonic packages
  • Optical modules
  • Epoxy and eutectic die attach

What do the numbers mean?

Vacuum & pumping1

Dispense Pumps
2 cartridge style, rotary, positive displacement pumps[1]
Accurate?

Wafer handling1

Height Sensing (dispense)
3 point laser height mapping of substrate plane[1]
Accurate?

Gas & chemistry1

Forming Gas
Nitrogen, Argon or N2-H2 or Ar-H2[1]
Accurate?

Optics & imaging2

Applications
Microwave modules, hybrids, optical modules, epoxy and eutectic die attach[1]
Accurate?
Cameras
2 down looking with one shared optical path, 1 up looking[1]
Accurate?

Performance1

XY Axis Accuracy
5 µm, 3 sigma[1]
Accurate?

Control & software2

Force Control
Programmable per placement, 10 grams to 2 Kg[1]
Accurate?
Dispense Needle Calibration
Automatic software calibration routine using through beam sensors[1]
Accurate?

Configuration & options10

Smallest Die
0.008 inch square[1]
Accurate?
Vision System
Edge detection and pattern recognition[1]
Accurate?
Lighting
Red, green and blue; ring or collimated; programmable intensity[1]
Accurate?
Pickup Tips
13 tips in standard tip change bank; multiple banks optional; also holds stamping tips[1]
Accurate?
Collets
Perimeter collets, inverted pyramid collets, plus custom[1]
Accurate?
Waffle Packs
Up to 72 2 x 2 in waffle or Gel-Paks or 4 x 4 in[1]
Accurate?
Tape and Reel
2 tape and reel bases with multiple reels each[1]
Accurate?
Eutectic Bonding
Programmable ramp rates up to 450°C[1]
Accurate?
Scrub
Programmable plus library of customizable scrub motions[1]
Accurate?
Dispense Needle Clean
Automatic, programmable occurrence between dispense patterns[1]
Accurate?

Vintage & configurations

Control-system eraWindows[1]

Interested in this tool?
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What replaced it?

  • siblingMRSI 705— Listed in the same product navigation as the M5.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Forming GasNitrogen, Argon or N2-H2 or Ar-H2[1]
  • Dispense Pumps2 cartridge style, rotary, positive displacement pumps[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the M5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M5 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the M5 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • No publicly documented failure modes or field errata for the M5 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the M5 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the M5 are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]Contact - MRSI Systems— MRSI Systems — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.