RS 4000 TM Air Suspension Table

An air suspension table is a vibration-isolation support platform for laboratory or equipment setups. Air suspension tables generally use a rigid tabletop supported by pneumatic isolators that reduce transmission of building vibration to the mounted instrument. Air suspension tables are support infrastructure rather than primary process tools.

Air suspension tables generally isolate sensitive instruments by supporting the table surface on air-based mounts or legs. The pneumatic support layer helps attenuate vibration and mechanical disturbance reaching the instrument placed on the table. The table provides a stable mounting surface for tools whose performance can be affected by environmental motion.

Air suspension tables fit around process and metrology environments as supporting infrastructure for vibration-sensitive work. Such tables are typically installed beneath laboratory instruments, inspection setups, optical assemblies, or precision benches rather than serving as a direct wafer-processing step. The table therefore sits alongside fabrication and development activities as a physical support platform.

Air suspension tables are used where mechanical stability is important for measurement, alignment, imaging, or other precision laboratory tasks. Such tables can support optics, microscopes, probes, metrology hardware, and benchtop experimental assemblies that benefit from reduced environmental vibration. In semiconductor-related settings, the role of the table is to support adjacent technical work rather than to perform the process itself.