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Orient Service

S 1861 14

DepositionOrient Service S 1861 14 family
Research Quality: 20% complete
Orient ServiceS 1861 14
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What is it?

Orient Service S 1861 14 is a PECVD (plasma-enhanced chemical vapor deposition) system used with SiO2, HCL, HF, NOx, and NH3.

What do the numbers mean?

Vacuum & pumping2

Missing bower, sump pump, circulate pump and heater[1]
Accurate?
Missing heater, sump pump, circulate pump[2]
Accurate?

Configuration & options2

Used with SiO2,HCL,HF,NOx,NH3,etc[1]
Accurate?
Missing heater[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationMissing bower, sump pump, circulate pump and heater[1]
  • ConfigurationMissing heater, sump pump, circulate pump[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Orient Service S 1861 14?

It is a PECVD system, or plasma-enhanced chemical vapor deposition machine.[1][2][3]

What make and model are given for this equipment?

The make is Orient Service and the model is S 1861 14.[1][2][3]

Not publicly documented

The following facts about the S 1861 14 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 1861 14 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S 1861 14 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S 1861 14 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S 1861 14 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S 1861 14 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
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Last updated Jul 29, 2026.

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