SCIEX
The SCIEX TAGA 3000 is a quadrupole mass spectrometer system. The SCIEX TAGA 3000 is designed for real-time air monitoring of trace gases in the ambient atmosphere. The SCIEX TAGA 3000 uses atmospheric-pressure chemical ionization (APCI).[1][2]
Produced
1979–
Vacuum
Cryopump with liquid helium compressor[1]
Gas delivery
TAGA (Trace Atmospheric Gas Analyzer)[1]
The SCIEX TAGA 3000 uses atmospheric-pressure chemical ionization. The SCIEX TAGA 3000 uses a cryopump vacuum system with a liquid helium compressor. The SCIEX TAGA 3000 could be mounted in a van for mobile operation and could analyze air while in motion.[1][2]
The Trace Atmospheric Gas Analyser model 3000 is a specialized single quadrupole mass spectrometer with an air sampling inlet system and ion source that operates at atmospheric pressure. The TAGA 3000 samples ambient air continuously at a high flow rate of 100 l/min directly into the ionization chamber. The TAGA 3000 uses added chemical ionization reagents to selectively ionize different classes of contaminants. The TAGA 3000 subjects the resulting ions to mass analysis up to 250 amu. The TAGA 3000 can achieve mass fingerprinting in approximately 20 minutes when all four chemical ionization reagents are used.[4]
Air-monitoring mass spectrometers sit alongside manufacturing, remediation, or laboratory operations rather than inside the core sequence of deposition, lithography, etch, implant, and clean steps. Air-monitoring mass spectrometers are typically used to observe airborne chemicals around tools, exhaust streams, work areas, or outdoor sites so that process or environmental conditions can be assessed in near real time.
The SCIEX TAGA 3000 was used in 1979 for real-time monitoring of toxic gas plumes of chlorine, styrene, and other gases released from the Mississauga train derailment and fire. The SCIEX TAGA 3000 provided timely information for emergency personnel during that incident. The SCIEX TAGA 3000 was acquired by government environmental agencies and the USEPA for applications including tracking air pollution and analyzing gases from contaminated sites.[1][2]
The TAGA 3000 was introduced in 1979.
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The SCIEX TAGA 3000 is a quadrupole mass spectrometer system used for real-time air monitoring of trace gases in the ambient atmosphere.[2][3]
The SCIEX TAGA 3000 uses atmospheric-pressure chemical ionization.[2][3][1]
The following facts about the TAGA 3000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the TAGA 3000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TAGA 3000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TAGA 3000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TAGA 3000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TAGA 3000 are on record.
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Last updated Oct 20, 2026.
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