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SCIEX

TAGA 3000

Precision OpticsIntroduced Produced 1979–SCIEX TAGA 3000 family
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The SCIEX TAGA 3000 is a quadrupole mass spectrometer system. The SCIEX TAGA 3000 is designed for real-time air monitoring of trace gases in the ambient atmosphere. The SCIEX TAGA 3000 uses atmospheric-pressure chemical ionization (APCI).[1][2]

SCIEXTAGA 3000
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Produced

1979–

Vacuum

Cryopump with liquid helium compressor[1]

Gas delivery

TAGA (Trace Atmospheric Gas Analyzer)[1]

Preceded by
First in line
This tool
TAGA 3000
Succeeded by
TAGA 6000
All related

What it is

The SCIEX TAGA 3000 is a TAGA mass spectrometer system used for real-time air monitoring of trace gases in the ambient atmosphere. The SCIEX TAGA 3000 is a quadrupole mass spectrometer. The SCIEX TAGA 3000 was introduced in 1979. The SCIEX TAGA 3000 preceded the TAGA 6000.[2][3][1]

How it works

The SCIEX TAGA 3000 uses atmospheric-pressure chemical ionization. The SCIEX TAGA 3000 uses a cryopump vacuum system with a liquid helium compressor. The SCIEX TAGA 3000 could be mounted in a van for mobile operation and could analyze air while in motion.[1][2]

The Trace Atmospheric Gas Analyser model 3000 is a specialized single quadrupole mass spectrometer with an air sampling inlet system and ion source that operates at atmospheric pressure. The TAGA 3000 samples ambient air continuously at a high flow rate of 100 l/min directly into the ionization chamber. The TAGA 3000 uses added chemical ionization reagents to selectively ionize different classes of contaminants. The TAGA 3000 subjects the resulting ions to mass analysis up to 250 amu. The TAGA 3000 can achieve mass fingerprinting in approximately 20 minutes when all four chemical ionization reagents are used.[4]

Where it fits in the process flow

General reference — not yet source-verified

Air-monitoring mass spectrometers sit alongside manufacturing, remediation, or laboratory operations rather than inside the core sequence of deposition, lithography, etch, implant, and clean steps. Air-monitoring mass spectrometers are typically used to observe airborne chemicals around tools, exhaust streams, work areas, or outdoor sites so that process or environmental conditions can be assessed in near real time.

Applications

The SCIEX TAGA 3000 was used in 1979 for real-time monitoring of toxic gas plumes of chlorine, styrene, and other gases released from the Mississauga train derailment and fire. The SCIEX TAGA 3000 provided timely information for emergency personnel during that incident. The SCIEX TAGA 3000 was acquired by government environmental agencies and the USEPA for applications including tracking air pollution and analyzing gases from contaminated sites.[1][2]

  • Real-time monitoring of toxic gas plumes
  • Monitoring chlorine, styrene, and other gases released from the Mississauga train derailment and fire

What do the numbers mean?

Vacuum & pumping2

Ionization method
Atmospheric-pressure chemical ionization (APCI)[1]2 sources
Accurate?
Vacuum system
Cryopump with liquid helium compressor[1]2 sources
Accurate?

Gas & chemistry2

Product line
TAGA (Trace Atmospheric Gas Analyzer)[1]2 sources
Accurate?
Use
real-time monitoring of toxic gas plumes[1]
Accurate?

Configuration & options6

Instrument name
TAGA 3000[1]2 sources
Accurate?
Manufacturer
SCIEX[1]2 sources
Accurate?
Year mentioned in use
1979[1]
Accurate?
Mass analyzer type
Quadrupole[1]2 sources
Accurate?
Mobility
Mobile (mounted in van)[1]2 sources
Accurate?
Introduced
1979[2]
Accurate?

Vintage & configurations

  1. 1979Production start[2]

    The TAGA 3000 was introduced in 1979.

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What replaced it?

  • successorSCIEX TAGA 6000— First commercial triple quadrupole mass spectrometer, introduced in 1981.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Product lineTAGA (Trace Atmospheric Gas Analyzer)[1]
  • Usereal-time monitoring of toxic gas plumes[1]
  • Ionization methodAtmospheric-pressure chemical ionization (APCI)[1]
  • Vacuum systemCryopump with liquid helium compressor[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of instrument is the SCIEX TAGA 3000?

The SCIEX TAGA 3000 is a quadrupole mass spectrometer system used for real-time air monitoring of trace gases in the ambient atmosphere.[2][3]

What ionization method does the SCIEX TAGA 3000 use?

The SCIEX TAGA 3000 uses atmospheric-pressure chemical ionization.[2][3][1]

Was the SCIEX TAGA 3000 a mobile instrument?

The SCIEX TAGA 3000 could be mounted in a van for mobile operation and was capable of analyzing air while in motion.[1][2]

What vacuum system did the SCIEX TAGA 3000 use?

The SCIEX TAGA 3000 used a cryopump vacuum system with a liquid helium compressor.[2][3][1]

Not publicly documented

The following facts about the TAGA 3000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the TAGA 3000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the TAGA 3000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the TAGA 3000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the TAGA 3000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the TAGA 3000 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.org — en.wikipedia.orgen.wikipedia.org
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]SCIEX TAGA 3000 vs SCIEX X500-Series comparison | Waferpedia — waferpedia.comwaferpedia.com
  4. [4]Full text of "Air quality survey (TAGA 3000), Acriform Engineering Inc., Newmarket, August 1989 : report" — archive.orgarchive.org
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Last updated Oct 20, 2026.

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