Signatone
The Signatone S-1060R is a 4-inch hot chuck thermal probing system. The Signatone S-1060R has an ambient to 600°C temperature range. The Signatone S-1060R has a chuck actual diameter of 4.5 inches.[1]
A thermal probing system is bench equipment used to contact devices or substrates electrically while controlling chuck temperature. Thermal probing systems support electrical characterization under heated or cooled conditions during engineering, analysis, and device evaluation. Thermal probing systems are commonly used outside the main production line for laboratory and characterization work.
The Signatone S-1060R uses a temperature-controlled chuck to hold the test article during probing. The Signatone S-1060R is specified with ±1°C temperature accuracy, 1°C temperature resolution, and ±1°C temperature uniformity. The Signatone S-1060R is specified with 0.005-inch TIR surface flatness across the temperature range and typical 0.010-inch surface-to-base expansion across the temperature range. The Signatone S-1060R is specified with 10^6 ohms surface-to-ground isolation, with 10^14 ohms available with a triax top, and with less than 300 pF surface-to-ground capacitance. The Signatone S-1060R is specified with an approximate 10 nA electrical noise floor. Cooling from 600°C to 350°C is by gas, and cooling from 350°C to ambient is by liquid.[1]
Thermal probing systems are used after devices, wafers, or packaged parts are available for electrical contact and before final analytical conclusions are drawn from the measurements. Thermal probing systems fit into characterization, failure analysis, and engineering evaluation flows rather than patterning, deposition, etch, or wafer transport operations. Thermal probing systems are typically used alongside lab measurement setups that examine behavior as temperature changes.
Process applications and technology nodes documented for this tool.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| S-1060R-6SND3L | — | — | Thermal Probing System; version listed as 200 mm. | fabsurplus.com[2] |
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The Signatone S-1060R is specified for an ambient-to-600°C temperature range.[1]
The Signatone S-1060R is specified with ±1°C temperature accuracy, 1°C temperature resolution, and ±1°C temperature uniformity.[1]
The Signatone S-1060R is specified with a 4.5-inch actual chuck diameter.[1]
The Signatone S-1060R uses gas cooling from 600°C to 350°C and liquid cooling from 350°C to ambient.[1]
The controller is designated Model 1060R, has 19-inch width, 7-inch height, and 20-inch depth, and mounts in a standard 19-inch rack.[1]
The following facts about the S-1060R are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S-1060R are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the S-1060R are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S-1060R are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S-1060R is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the S-1060R are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 16, 2026.