Waferpedia

Strasbaugh

6 DS SP Planarizer

CMPStrasbaugh 6 DS SP Planarizer family
Research Quality: 30% complete
6 DS SP Planarizer — Inventory photo
Fig. 016 DS SP PlanarizerInventory photo[1]

What is it?

The Strasbaugh 6 DS SP Planarizer is a CMP planarizer with stated wafer compatibility of 4, 6, and 8 inch wafers.

What do the numbers mean?

Wafer handling6

Wafer compatibility
4", 6", 8"[1]
Accurate?
Throughput
7 wafer/hour for 800sec of polishing / wafer[1]
Accurate?
Loader unit type
Carrier Entegris PA 194-60MB-61C02[1]
Accurate?
Number of cassettes
2 lots at the same time / 4 cassettes inside the tool (2 sender, 2 receiver)[1]
Accurate?
Number of cassettes
2 lots at the same time /[2]
Accurate?
4 cassettes inside the tool (2 sender, 2 receiver)[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 6 DS SP Planarizer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6 DS SP Planarizer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 6 DS SP Planarizer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 6 DS SP Planarizer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 6 DS SP Planarizer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 6 DS SP Planarizer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Equipment inventory listing
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Last updated Jul 29, 2026.

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