Strasbaugh

6 DS SP Planarizer

CMP Strasbaugh 6 DS SP Planarizer family

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The Strasbaugh 6 DS SP Planarizer is a wafer planarization tool. The Strasbaugh 6 DS SP Planarizer supports wafer sizes of 4", 6", and 8". The Strasbaugh 6 DS SP Planarizer achieves a throughput of 7 wafers per hour for an 800-second polish per wafer.^[1]

6 DS SP Planarizer — Inventory photo — Fig. 016 DS SP PlanarizerInventory photo^[1]

What it is

General reference — not yet source-verified

The Strasbaugh 6 DS SP Planarizer is a semiconductor wafer planarization machine.

How it works

The Strasbaugh 6 DS SP Planarizer uses a carrier loader unit type.^[1]^[2]^[3]

Where it fits in the process flow

The Strasbaugh 6 DS SP Planarizer is compatible with cassettes arranged as two lots at the same time, with four cassettes inside the tool, including two sender cassettes and two receiver cassettes.^[1]^[2]^[3]

Applications

General reference — not yet source-verified

Wafer planarizers are used for chemical mechanical planarization workflows that prepare semiconductor surfaces for later patterning and interconnect processing.

What do the numbers mean?

Wafer handling8

Wafer compatibility: 4", 6", 8"^[1]
Throughput: 7 wafer/hour for 800sec of polishing / wafer^[1]
Loader unit type: Carrier Entegris PA 194-60MB-61C02^[1]
Number of cassettes: 2 lots at the same time / 4 cassettes inside the tool (2 sender, 2 receiver)^[1]
Number of cassettes: 2 lots at the same time /^[2]; 4 cassettes inside the tool (2 sender, 2 receiver)^[2]
Nominal wafer size: 6 inch^[1]
Wafer sizes: 6 inch^[1]

Configuration & options3

Make: Strasbaugh^[1]
Model: 6 DS SP^[1]
Listed equipment name: Strasbaugh 6 DS SP Planarizer^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of loader unit does the Strasbaugh 6 DS SP use?

The loader unit type is a Carrier Entegris PA 194-60MB-61C02.^[1]^[2]^[3]

Not publicly documented

The following facts about the 6 DS SP Planarizer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6 DS SP Planarizer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6 DS SP Planarizer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6 DS SP Planarizer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6 DS SP Planarizer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6 DS SP Planarizer is not on record.
Answerable by: an OEM datasheet or a fab qualification report