Waferpedia

Tystar

8300

Thermal ProcessTystar 8300 family
Research Quality: 30% complete
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Tystar8300
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What is it?

The sources identify the Tystar 8300 as a tube furnace used in thermal processing. The thermal processing recipes page provides available recipes, process limits, wafer cleaning steps, oxidation recipes, and notes that it has three furnace tubes with different uses and maximum temperature limits.

What can it run?

Process applications and technology nodes documented for this tool.

  • Thermal processing
  • Spin-on glass cure
  • AlGaAs oxidation
  • Wet oxidation
  • Dry oxidation
  • Wafer cleaning

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • DRY1050 may not be run for more than 3 hours.
  • WET1050 may not be run for more than 24 hours without authorization.
  • No recipe should be run with greater than 1 slpm gas flow without discussing with a supervisor first.

What do the numbers mean?

Control & software12

Available recipe
SOG425.001 - Spin-On Glass Cure[2]
Accurate?
Available recipe
ALGAAS.001 - Oxidation of AlGaAs[2]
Accurate?
Available recipe
ANNEAL.001 - Anneal with variable time and temp.[2]
Accurate?
Available recipe
WET1050.002 - WetOx at 1050°C[2]
Accurate?
Available recipe
DRY1050.002 - DryOx at 1050°C[2]
Accurate?
Available recipe
WETVAR.002 - WetOx, variable temp.[2]
Accurate?
Available recipe
DRYVAR.002 - DryOx, variable temp.[2]
Accurate?
Available recipe
WET1050.003 - WetOx at 1050°C[2]
Accurate?
Available recipe
DRY1050.003 - DryOx at 1050°C[2]
Accurate?
Available recipe
WETVAR.003 - WetOx, variable temp.[2]
Accurate?
Available recipe
DRYVAR.003 - DryOx, variable temp.[2]
Accurate?
Available recipe
ANNEAL.003 - Anneal with variable time and temperature[2]
Accurate?

Configuration & options7

Equipment type
Tube furnace[1]
Accurate?
Tube 1 use
Various applications[2]
Accurate?
Tube 2 use
Cleaned silicon only[2]
Accurate?
Tube 3 use
Processed silicon or other anneals[2]
Accurate?
Tube 1 maximum temperature
800°C max[2]
Accurate?
Tube 2 maximum temperature
1100°C, for ≤24hr[2]
Accurate?
Tube 3 maximum temperature
1100°C, for ≤24hr[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Tube 1——Various applications; supports SOG425.001, ALGAAS.001, and ANNEAL.001.wiki.nanotech.ucsb.edu[2]
Tube 2——For cleaned silicon only; supports WET1050.002, DRY1050.002, WETVAR.002, and DRYVAR.002.wiki.nanotech.ucsb.edu[2]
Tube 3——For processed silicon or other anneals; supports WET1050.003, DRY1050.003, WETVAR.003, DRYVAR.003, and ANNEAL.003.wiki.nanotech.ucsb.edu[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 8300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8300 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 8300 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the 8300 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 8300 are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the 8300 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
  2. [2]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
  3. [3]Tool List - UCSB Nanofab Wiki — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
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Last updated Jul 29, 2026.