5 entries
- 3600Tystar
The Tystar 3600 is an LPCVD deposition system.
CategoryDeposition - Mini Tytan 4600Tystar
The Tystar Mini-Tytan 4600 Furnace system is designed for diffusion, oxidation, and LPCVD applications.
CategoryThermal / DiffusionWafer50mm - Tytan 1600 LPCVDTystar
The Tystar Tytan 1600 LPCVD is a low pressure chemical vapor deposition system.
CategoryDeposition - 8300TystarCategoryThermal Process
- PVD1000TystarCategoryDeposition
