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Woollam

M-2000V

ellipsometryWoollam M-2000V family
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WoollamM-2000V
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What it is

The Woollam M-2000V is an ellipsometry tool. The J.A. Woollam M2000V Ellipsometer is in the characterization process area at nanoFAB. The J.A. Woollam M-2000V Ellipsometer is located in CME L2-154.[1][4][3]

How it works

General reference — not yet source-verified

An ellipsometry tool measures how the polarization state of reflected light changes at a surface or through a thin film stack. Ellipsometry is used to infer film thickness and optical properties by fitting the measured polarization response to an optical model. Ellipsometry is a noncontact optical metrology method used for thin film characterization.

Where it fits in the process flow

General reference — not yet source-verified

Ellipsometry is a characterization method used alongside thin film deposition and related materials analysis work. An ellipsometry tool is commonly used after a film is formed to check thickness or optical behavior, and the results can inform later process tuning or verification steps. Ellipsometry can support development and monitoring of deposition, etch, and multilayer film processes where optical film properties matter.

Applications

General reference — not yet source-verified

Ellipsometry is used for thin film characterization in research and microfabrication environments. An ellipsometry tool is commonly applied to measure film thickness, extract refractive behavior, and analyze layered surface coatings. Ellipsometry is useful for dielectric, semiconductor, and other optically responsive thin films when nondestructive optical metrology is needed.

  • ellipsometry
  • refractive index determination
  • thin film characterization

What do the numbers mean?

Power & electrical2

recommended comparison
use either the J.A. Woollam VASE Ellipsometer or the JA Woollam M-2000V Ellipsometer[2]
Accurate?
equipment name
J.A. Woollam M2000V Ellipsometer[4]
Accurate?

Control & software1

recommended use
refractive index determination from deposited films for OEI recipe development[2]
Accurate?

Configuration & options3

tool type
ellipsometry[1]
Accurate?
listed alongside
J.A. Woollam VASE VB-400 ellipsometry[1]
Accurate?
tool type
ellipsometry tool[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • recommended comparisonuse either the J.A. Woollam VASE Ellipsometer or the JA Woollam M-2000V Ellipsometer[2]
  • equipment nameJ.A. Woollam M2000V Ellipsometer[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Woollam M-2000V?

The Woollam M-2000V is an ellipsometry tool.[1][3][4]

Where is the J.A. Woollam M2000V Ellipsometer placed within nanoFAB operations?

The J.A. Woollam M2000V Ellipsometer is in the characterization process area.[4]

What location is given for the J.A. Woollam M-2000V Ellipsometer?

The J.A. Woollam M-2000V Ellipsometer is located in CME L2-154.[4]

Not publicly documented

The following facts about the M-2000V are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M-2000V are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the M-2000V are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the M-2000V are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the M-2000V are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the M-2000V is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]nanofab.ualberta.ca — nanofab.ualberta.cananofab.ualberta.ca
  2. [2]confluence.nanofab.ualberta.ca — confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
  4. [4]confluence.nanofab.ualberta.ca — confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
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Last updated Oct 17, 2026.