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Wyko

IR3

Precision OpticsWyko IR3 family
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WykoIR3
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Performance

to l/50[1]

Optics

10.6 µm[1]

What is it?

The WYKO IR3 is described as a phase shifting interferometer that directly measures wavefront quality with a 10.6 µm wavelength laser. It is presented for transmission and reflection testing, with beam diameters from 19 mm to 304 mm for full-aperture testing of a broad range of components.

What can it run?

Process applications and technology nodes documented for this tool.

  • optical part testing
  • IR transmitting materials and systems
  • wavefront quality measurement

What do the numbers mean?

Optics & imaging1

laser wavelength
10.6 µm[1]
Accurate?

Performance1

accuracy
to l/50[1]
Accurate?

Configuration & options4

type
fully configured phase shifting interferometer[1]
Accurate?
measurement focus
automatic wavefront and surface analysis of IR transmitting materials and systems[1]
Accurate?
test modes
transmission and reflection[1]
Accurate?
beam diameter range
19 mm (0.75 in.) up to 304 mm (12 in.)[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What does a precision optics system measure?General reference — not yet source-verified

It measures properties of optical surfaces such as form, height variation, texture, and visible surface defects, depending on the method used.

Does this class of equipment contact the part being measured?General reference — not yet source-verified

Class-level precision-optics metrology systems are commonly noncontact, using light-based sensing rather than a physical probe.

Where is this type of machine used in production?General reference — not yet source-verified

It is used in inspection and process-control stages to evaluate parts after fabrication or during development of an optical process.

What kinds of problems can it help find?General reference — not yet source-verified

It can help reveal surface irregularities, shape errors, texture variation, and defects that may affect optical performance.

Why use optical metrology instead of direct mechanical measurement?General reference — not yet source-verified

Optical metrology is suited to delicate or highly finished surfaces because it can capture fine surface information without touching the part.

Not publicly documented

The following facts about the IR3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IR3 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IR3 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IR3 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IR3 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IR3 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
  2. [2]Veeco Metrology Products by Nameweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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