Wyko

IR3

Research Quality: 50% complete

The WYKO IR3 is a fully configured phase shifting interferometer. The WYKO IR3 is for automatic wavefront and surface analysis of IR-transmitting materials and systems. The WYKO IR3 directly measures wavefront quality with a 10.6 m wavelength laser.^[1]^[2]

WykoIR3

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Performance

to l/50^[2]

Optics

10.6 µm^[2]

What it is

General reference — not yet source-verified

An infrared phase shifting interferometer is a precision optics metrology instrument. Infrared interferometers of this class are used to analyze transmitted wavefront quality and surface form on materials that are transparent at infrared wavelengths.

How it works

The Wyko IR3 is a phase shifting interferometer for automatic wavefront and surface analysis of IR-transmitting materials and systems.^[1]

Where it fits in the process flow

General reference — not yet source-verified

Precision optics interferometers of this class are used in metrology and inspection rather than in patterning, deposition, or etch. Such tools are typically placed around optical fabrication and qualification steps to verify component quality before assembly, after polishing, and during acceptance testing of infrared optics and optical systems.

Applications

The Wyko IR3 is used for automatic wavefront and surface analysis of IR-transmitting materials and systems.^[1]

optical part testing
IR transmitting materials and systems
wavefront quality measurement

What do the numbers mean?

Optics & imaging1

laser wavelength: 10.6 µm^[2]

Performance2

accuracy: to l/50^[2]
Accuracy: l/50^[2]

Configuration & options8

type: fully configured phase shifting interferometer^[2]
measurement focus: automatic wavefront and surface analysis of IR transmitting materials and systems^[2]
test modes: transmission and reflection^[2]
beam diameter range: 19 mm (0.75 in.) up to 304 mm (12 in.)^[2]
Tool type: fully configured phase shifting interferometer^[1]
Function: automatic wavefront and surface analysis of IR-transmitting materials and systems^[1]
Measurement mode: transmission and reflection^[2]
Beam diameter range: 19 mm to 304 mm^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of instrument is the Wyko IR3?

The Wyko IR3 is a fully configured phase shifting interferometer.^[1]

What does the Wyko IR3 analyze?

The Wyko IR3 performs automatic wavefront and surface analysis.^[1]

What types of materials or systems is the Wyko IR3 intended for?

The Wyko IR3 is intended for IR-transmitting materials and systems.^[1]

Not publicly documented

The following facts about the IR3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IR3 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IR3 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IR3 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IR3 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IR3 is not on record.
Answerable by: an OEM datasheet or a fab qualification report