Wyko
RST500
The Wyko RST500 is an economical optical profiler. The Wyko RST500 measures surface roughness from 0.1 nm to several millimeters. The Wyko RST500 provides highly accurate 3-D surface area analysis.[1][2]
What it is
General reference — not yet source-verifiedAn optical profiler measures surface topography without contacting the part. The RST500 belongs to the class of metrology tools used to characterize surface form, roughness, and local height variation on a wide range of materials.
How it works
General reference — not yet source-verifiedAn optical profiler measures a surface by using optical sensing rather than a stylus. An instrument of this class is used to reconstruct surface height information and derive roughness and texture metrics from the measured topography.
Where it fits in the process flow
General reference — not yet source-verifiedThe RST500 fits in surface metrology and inspection workflows. The RST500 is used to measure roughness and surface area characteristics of parts before they move to downstream process steps or final evaluation.
The RST500 is used as a non-destructive measurement tool. The RST500 supports process control by characterizing surface condition without altering the sample.
What can it run?
Process applications and technology nodes documented for this tool.
- surface roughness measurement
- 3-D surface area analysis
What do the numbers mean?
Optics & imaging2
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What measurements does the Wyko RST500 perform?
The Wyko RST500 is used for surface roughness measurement and three-dimensional surface area analysis.[2]
Not publicly documented
The following facts about the RST500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RST500 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RST500 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RST500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RST500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RST500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]RST500 — Wyko | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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