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YES

YES-310TA

Thermal ProcessingYES YES-310TA family
Research Quality: 30% complete
YESYES-310TA
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What is it?

The YES-310TA is a Yield Engineering HMDS oven listed in the thermal processing equipment at the UD Nanofabrication Facility.

What can it run?

Process applications and technology nodes documented for this tool.

  • Thermal processing
  • HMDS oven use

What do the numbers mean?

Configuration & options4

OEM
Yield Engineering[1]
Accurate?
Model
YES-310TA[1]
Accurate?
Tool type
HMDS Oven[1]
Accurate?
Category
Thermal Processing[1]
Accurate?
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What replaced it?

  • siblingYES 1518Source groups it as another dual-function model in the same specification chart.source[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the YES-310TA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the YES-310TA are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the YES-310TA are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the YES-310TA are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the YES-310TA are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the YES-310TA is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]udnf.udel.eduudnf.udel.eduudnf.udel.edu
  2. [2]web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.