YES

1518

Thermal / Diffusion 4-inch, 5-inch, 6-inch, 8-inch YES 1518 family

Research Quality: 30% complete

LinkedIn X Email

YES1518

No photo available yet

Wafer size

4-inch, 5-inch, 6-inch, 8-inch

Performance

2 full loads/hr.^[1]

What is it?

The YES-1518 is described as a dual-function, "Ultra-Clean" system. Source text states capacity for HMDS prime as 8 cassettes of 4-inch wafers or 1 cassette of 5-8 inch wafers, and for image reversal as 4 cassettes of 4-inch wafers or 1 cassette of 5-8 inch wafers. It is also listed as supporting vapor prime above the listed vapor-prime capacity, with throughput, cleanliness, HMDS usage, temperature, dimensions, weight, and power specifications provided in the product specification chart.

What can it run?

Process applications and technology nodes documented for this tool.

HMDS prime
image reversal
vapor prime

What do the numbers mean?

Power & electrical1

Power: 115V, 60Hz, 1 Phase, 30A or 220V, 50 Hz, 1 Phase, 15A^[2]

Wafer handling4

Capacity for HMDS Prime: 8 cassettes of 4 in. wafers, or 1 cassette of 5-8 in. wafers^[1]
Capacity for Image Reversal: 4 cassettes of 4 in. wafers, or 1 cassette of 5-8 in. wafers^[1]
Cleanliness: < 1 x 1 micron particle and < 10 x 1 micron particles per 6 in. wafer^[1]
HMDS usage: < 5 ml/200 wafers (75 prime cycles/pint)^[1]

Performance2

Throughput for HMDS Prime: 2 full loads/hr.^[1]
Throughput for Image Reversal: (2) 1/2 loads/hr.^[1]

Dimensions & facilities3

Chamber dimensions: 20-in (508mm) High; 20-in (508mm) Wide; 15.12-in (384mm) Deep^[2]
System dimensions: 26-in (660mm) High; 33.75-in (858mm) Wide; 25-in (635mm) Deep^[2]
Weight: 350 pounds^[2]

Configuration & options5

Model: YES-1518^[1]
Type: dual function^[1]
System description: Our "Ultra-Clean" system^[1]
Temperature: 160°C max^[1]
Outer system: stainless steel^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
YES-1518SM	—	—	Silylation variant; source states it has above-listed capacities for Vapor Prime and Image Reversal, or Silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers.	web.archive.org^[2]

Interested in this tool?

Embed spec card

What replaced it?

siblingYES YES-310TA— Source groups it as another dual-function model in the same specification chart.source^[2]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power115V, 60Hz, 1 Phase, 30A or 220V, 50 Hz, 1 Phase, 15A^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 1518 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1518 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 1518 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1518 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1518 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1518 are on record.
Answerable by: an OEM parts catalog or a service engineer