Zygo
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The Zygo GPI XP Interferometer is a phase-modulating interferometer for noncontact measurement of flat or spherical surfaces and transmitted wavefront measurement of optical components. The GPI XP/D uses precision phase modulation while a 640 x 480 CCD camera captures several fringe images analyzed by MetroPro software.[1]

The Zygo GPI XP is an interferometer used for noncontact measurement of optical surfaces and components. The GPI XP uses a 640-by-480 pixel CCD camera and MetroPro software version 8.3.5. The system includes a 4-inch transmission flat (FT) lens attachment for f-ratio measurement.[2]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| GPI XP/D | — | — | The GPI XP/D uses the precision of phase modulation for measurement; it is distinguished from the GPI FlashPhase which uses single-frame acquisition. | web.archive.org[1] |
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The following facts about the GPI XP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GPI XP are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the GPI XP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the GPI XP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the GPI XP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the GPI XP are on record.
Answerable by: university cleanroom staff or an OEM application specialist
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Last updated Aug 25, 2026.
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