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Zygo

GPI XP

Precision OpticsZygo GPI family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Zygo GPI XP Interferometer is a phase-modulating interferometer for noncontact measurement of flat or spherical surfaces and transmitted wavefront measurement of optical components. The GPI XP/D uses precision phase modulation while a 640 x 480 CCD camera captures several fringe images analyzed by MetroPro software.[1]

GPI XP — Inventory photo
Fig. 01GPI XPInventory photo[2]

How it works

The GPI XP/D uses precision phase modulation for data acquisition. The GPI XP/D modulates the interferometric cavity length during measurement while a 640 x 480 CCD camera captures several fringe images. MetroPro analyzes those fringe images to create a detailed measurement of the part being tested.[1]

Applications

The GPI family is used for noncontact measurement of flat or spherical surfaces and for transmitted wavefront measurement of optical components and assemblies. The GPI family measures glass or plastic optical components such as flats, lenses, and prisms. The GPI family also measures precision metal components, polished ceramics, and contact lens molds.[1]

What do the numbers mean?

Wafer handling1

Wafer Size
4 inch[2]
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Optics & imaging6

CCD camera
640 x 480 pixels[2]
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Transmission Flats (FT) 4" lens attachment for f-ration measurement[2]
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CCD Camera Resolution
640 x 480 pixels[2]
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Transmission Flats
4 inch lens attachment for f-ratio measurement[2]
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Category
Precision Optics[4]
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Transmission Flats (FT)
4 inch lens attachment for f-ratio measurement[2]
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Control & software1

Software
MetroPro 8.3.5[2]
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Configuration & options5

with Metropro 8.3.5[2]
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Make
Zygo[2]
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Model
GPI XP[2]
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Vintage
2004[4]
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OEM
Zygo[2]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
GPI XP/D——The GPI XP/D uses the precision of phase modulation for measurement; it is distinguished from the GPI FlashPhase which uses single-frame acquisition.web.archive.org[1]
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Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • Zygo GPI XPS Apre Instruments HW and SW upgradeIn Productionsource[5]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of measurement does the Zygo GPI XP perform?

The Zygo GPI XP is an interferometer for noncontact measurement of flat or spherical surfaces and for transmitted wavefront measurement of optical components and assemblies.[1]

How does the GPI XP acquire measurement data?

The GPI XP/D uses precision phase modulation during measurement while a 640 x 480 CCD camera captures several fringe images. MetroPro analyzes those fringe images to create a detailed measurement of the part being tested.[1]

Not publicly documented

The following facts about the GPI XP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GPI XP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the GPI XP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the GPI XP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the GPI XP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly hosted manuals, SOPs, or datasheets for the GPI XP are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]web.archive.org — zygo.com (Mar 13, 2006)web.archive.org
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]waferpedia.comwaferpedia.com
  5. [5]Equipment inventory listing
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Last updated Oct 19, 2026.

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