Waferpedia

Zygo

GPI XP

Precision OpticsZygo GPI family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Zygo GPI XP Interferometer is a phase-modulating interferometer for noncontact measurement of flat or spherical surfaces and transmitted wavefront measurement of optical components. The GPI XP/D uses precision phase modulation while a 640 x 480 CCD camera captures several fringe images analyzed by MetroPro software.[1]

GPI XP — Inventory photo
Fig. 01GPI XPInventory photo[2]

What it is

The Zygo GPI XP is an interferometer used for noncontact measurement of optical surfaces and components. The GPI XP uses a 640-by-480 pixel CCD camera and MetroPro software version 8.3.5. The system includes a 4-inch transmission flat (FT) lens attachment for f-ratio measurement.[2]

What do the numbers mean?

Wafer handling1

Wafer Size
4 inch[2]
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Optics & imaging4

CCD camera
640 x 480 pixels[2]
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Transmission Flats (FT) 4" lens attachment for f-ration measurement[2]
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CCD Camera Resolution
640 x 480 pixels[2]
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Transmission Flats
4 inch lens attachment for f-ratio measurement[2]
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Control & software1

Software
MetroPro 8.3.5[2]
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Configuration & options4

with Metropro 8.3.5[2]
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Make
Zygo[2]
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Model
GPI XP[2]
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Vintage
2004[2]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
GPI XP/DThe GPI XP/D uses the precision of phase modulation for measurement; it is distinguished from the GPI FlashPhase which uses single-frame acquisition.web.archive.org[1]
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Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • Zygo GPI XPS Apre Instruments HW and SW upgradeIn Productionsource[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the resolution of the CCD camera in the GPI XP?

The GPI XP uses a CCD camera with 640 by 480 pixels.[2]

What size transmission flat does the GPI XP support?

The GPI XP includes a 4-inch transmission flat (FT) lens attachment for f-ratio measurement.[2]

Not publicly documented

The following facts about the GPI XP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GPI XP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the GPI XP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the GPI XP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the GPI XP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly hosted manuals, SOPs, or datasheets for the GPI XP are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgzygo.com (Mar 13, 2006)web.archive.org
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Equipment inventory listing
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Last updated Aug 25, 2026.

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