Zygo
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The Zygo GPI XP Interferometer is a phase-modulating interferometer for noncontact measurement of flat or spherical surfaces and transmitted wavefront measurement of optical components. The GPI XP/D uses precision phase modulation while a 640 x 480 CCD camera captures several fringe images analyzed by MetroPro software.[1]

The GPI XP/D uses precision phase modulation for data acquisition. The GPI XP/D modulates the interferometric cavity length during measurement while a 640 x 480 CCD camera captures several fringe images. MetroPro analyzes those fringe images to create a detailed measurement of the part being tested.[1]
The GPI family is used for noncontact measurement of flat or spherical surfaces and for transmitted wavefront measurement of optical components and assemblies. The GPI family measures glass or plastic optical components such as flats, lenses, and prisms. The GPI family also measures precision metal components, polished ceramics, and contact lens molds.[1]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| GPI XP/D | — | — | The GPI XP/D uses the precision of phase modulation for measurement; it is distinguished from the GPI FlashPhase which uses single-frame acquisition. | web.archive.org[1] |
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The Zygo GPI XP is an interferometer for noncontact measurement of flat or spherical surfaces and for transmitted wavefront measurement of optical components and assemblies.[1]
The GPI XP/D uses precision phase modulation during measurement while a 640 x 480 CCD camera captures several fringe images. MetroPro analyzes those fringe images to create a detailed measurement of the part being tested.[1]
The following facts about the GPI XP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GPI XP are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the GPI XP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the GPI XP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the GPI XP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the GPI XP are on record.
Answerable by: university cleanroom staff or an OEM application specialist
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Last updated Oct 19, 2026.
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