Zygo
GPI XP HR
The Zygo GPI XP HR is a 4-inch interferometer. The Zygo GPI XP HR is configured with a Dell PC. The Zygo GPI XP HR runs Zygo MetroPro software under Microsoft Windows NT.[1][2]
What it is
The Zygo GPI XP HR is a precision optics interferometer.[2]
How it works
The Zygo GPI XP HR uses a computer-driven control and viewing setup, with MetroPro software operating under Microsoft Windows NT and video output for operator viewing.[1]
Where it fits in the process flow
General reference — not yet source-verifiedA precision optics interferometer belongs in metrology rather than in material removal or deposition.
The Zygo GPI XP HR supports inspection and verification of optical parts after fabrication steps that create the finished surface.
Applications
General reference — not yet source-verifiedA precision optics interferometer is used for surface and form measurement on optical components.
What do the numbers mean?
Power & electrical2
Wafer handling1
Optics & imaging1
Control & software2
- Computer
- Dell PC; configured with hard drive CD-ROM, floppy drive, and 19 inch color monitor (printers optional)[1]
Configuration & options11
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Zygo GPI XP HR?
The Zygo GPI XP HR is a precision optics interferometer.[2]
Not publicly documented
The following facts about the GPI XP HR are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GPI XP HR are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the GPI XP HR are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the GPI XP HR are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the GPI XP HR are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the GPI XP HR is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 13, 2026.
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